@book { OberflchenanalysevonSiSiGeSchichten,
    title = "Oberflächenanalyse von Si/SiGe-Schichten",
    author = "Harald {Sander}",
    year = "2002",
    publisher = "Diplom.de",
    address = "Hamburg, Deutschland",
    doi = "10.3239/9783832451127",
    url = "https://m.diplom.de/document/220639"
}