@book { MechanicalReconstructionofanIndustrial915MHzMicrowaveCavityPlasmaReactorSystemforChemicalVaporDepositionDiamondProcesses, title = "Mechanical Reconstruction of an Industrial 915MHz Microwave Cavity Plasma Reactor System for Chemical Vapor Deposition Diamond Processes", author = "Jörg {Fricke}", year = "2004", publisher = "Diplom.de", address = "Hamburg, Deutschland", doi = "10.3239/9783832475888", url = "https://m.diplom.de/document/222865" }